TFM100G2	TFM100S
1   +Power In 2   2.5 V Bias Monitor (5 V Option) 3   Signal Ground 4   Power Ground 5   Signal Z-Achse 6   Signal X-Achse 7   Gehäuse Ground 8   Signal Y-Achse 9   Optionen: Power On/Off, Testfunktion	1   +Power In 2  Temp.-Monitor (Option) 3   Signal Ground 4   Power Ground 5   Signal Z-Achse 6   Signal X-Achse 7   Gehäuse Ground 8   Signal Y-Achse 9   - Power In (Option)